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  1. Frédéric Jacobs @[email protected] ·

    Are Soft X-ray coming after High-NA EUV?

    Theoretical NA: 0.3 - 0.5
    Wavelength: 6.5 nm - 6.7 nm

    Building such a lithography process will take a long time, but it's nice to see some progress on understanding what will be needed from mirrors (current coatings would absorb this light) and photoresist to light sources (gadolinium laser-produced plasma?).

    nature.com/articles/s44286-025

    #SoftXRay #Lithography

    #softxray #lithography